NIST DTSA-II is "Power tools for X-ray Microanalysis."
NIST DTSA-II depends upon the EPQ library which is available here.
Installable versions of NIST DTSA-II are available here
Pre-release versions of NIST DTSA-II are available here with Windows JRE and here w/o a JRE
Documentation for DTSA-II is here.